Semitool is a world leader in the design, development, manufacture and support of high performance wet chemical processing equipment for use in fabrication of semiconductor devices.  Lund Engineering and Semitool have a long history of working together on innovative, proprietary projects including, chemical processing, wafer handling, carrier cleaning, thermal processing, critical cleans, and copper deposition/etch.

LEI designed and built this prototype slide loader using only one stepper motor axis.  The unique mechanical design allows the stepper to pull the cassette into the loader housing, clamp the cassette in place, close the housing door, lock it shut, open the bail on the cassette, and index each of the cassette slides.  The loader was designed and drafted in AutoDesk Inventor.

 Lund Engineering was responsible for the concept, design, engineering and construction of the prototype loader.

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